<strong>Development of MgO-based ceramics with excellent corrosion resistance against plasma etching</strong>

Takashi Ikeda

講演情報

Poster presentation

B » B-1:Hard Materials

[P-B1] Hard Materials

2017年11月7日(火) 19:00 〜 20:30 Room D_P-6 (2F, International Conference Hall III)

Core Time: November 7 (Tue) 19:00-20:30
Presentation Time:odd number;19:00-19:45 even number:19:45-20:30

19:00 〜 20:30

[P-B1-01] Development of MgO-based ceramics with excellent corrosion resistance against plasma etching

*Takashi Ikeda¹, Yuji Kasashima², Fumihiko Uesugi², Kota Tsutsumi¹ (1. NIPPON TUNGSTEN CO.,LTD.(Japan), 2. Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology(AIST)(Japan))

キーワード：corrosion resistance, plasma etching, MgO, composite ceramics, semiconductor

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講演情報

[P-B1] Hard Materials

[P-B1-01] Development of MgO-based ceramics with excellent corrosion resistance against plasma etching

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