PDF Download Schedule 12 Comment (0) [1P67S] Optimization of Spindt-type emitter geometry in large hole cavities using triode high power pulsed magnetron sputtering ○小澤真1),出井菜々子),モハメッド シュルズミヤ1),中野武雄1),大崎壽2),村上勝久2),長尾昌善2) (1)成蹊大院理工,2)産総研)