PDF Download Schedule 13 Comment (0) [1P81S] Improvement of radial profiles of Al-doped ZnO films properties by ICP-assisted sputtering with alumina (Al2O3) -coated inner coil ○今泉悟1)，中村忠2)，沖村邦雄2)，モハメッド シュルズミヤ3) (1)東海大院工，2)東海大工，3)成蹊大理工)
