[3Ba] 薄膜(TF)

[3Ba03] Atomic structures and interface states density at SiO₂/4H-SiC interface

○山下良之^1,2)，INDARI DwiEfi^1,2)，蓮沼隆³⁾，山部紀久夫³⁾ (¹⁾物材機構，²⁾九大工，³⁾筑波大)