[3Ba] 薄膜(TF)

[3Ba10S] Low temperature formation of indium oxide thin-films using solution process with excimer light assisted annealing and characterization of thin-film transistors

○高野圭佑^1,2)，大浦紀頼^1,2)，和田英男²⁾，小山政俊²⁾，前元利彦²⁾，佐々誠彦²⁾ (¹⁾大工大院工，²⁾大工大ナノ材料マイクロデバイス研究センター)