2020年日本表面真空学会学術講演会

Presentation information

薄膜(TF)

[3Ba] 薄膜(TF)

Sat. Nov 21, 2020 9:00 AM - 12:00 PM B会場

座長:後藤 哲也・北川 雅俊

11:30 AM - 11:45 AM

[3Ba11] Research on composition and optical properties of β-FeSi2 thin film by co-sputtering

○Zhang Xuanwei1),舛中翔馬1),名村今日子1),鈴木基史1) (1)京大院工)