Session information

Vacuum Science Technology(VST)

[1Ea01-05] VST

Wed. Nov 3, 2021 9:00 AM - 10:15 AM Room E (Naoshima)

Chair:Junichiro Kamiya(Japan Atomic Energy Agency)

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9:00 AM - 9:15 AM

[1Ea01] Pressure measurements of argon gas at the entrance and the exit of micropipettes with various diameters

*Tomohide Takami¹, Naoki Kaneko¹, Kyo Shibuya¹, Kazuho Miyashita¹, Mizuki Ohta¹, Shiro Seki¹ (1. Kogakuin University)

9:15 AM - 9:30 AM

[1Ea02] Flow in the transition range and Knudsen minimum

*namio matsuda¹ (1. Tokyo Denki University)

9:30 AM - 10:00 AM

[1Ea03] Development of optical pressure standard
-evaluating pressure from refractive index and temperature-

*Yoshinori Takei¹, Hajime Yoshida¹, Souichi Telada¹, Youichi Bitou¹, Tokihiko Kobata¹ (1. National Institute of Advanced Industrial Science and Technology (AIST))

10:00 AM - 10:15 AM

[1Ea05] Multiphysics simulations of rarefied gas flows using DSMC with quasi-Nanbu scheme

*Kazuki Denpoh¹ (1. Tokyo Electron Technology Solutions Ltd.)

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