Vacuum Science Technology(VST)

[1Ep08-13] VST

Wed. Nov 3, 2021 3:15 PM - 4:45 PM Room E (Naoshima)

Chair:Tomohide Takami(Kogakuin University)

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3:15 PM - 3:45 PM

[1Ep08] Simple Method for Calculating the Flow Rate in a Cylindrical Tube of Arbitrary Length over a Whole Flow Regime

*Hajime Yoshida¹, Yoshinori Takei¹, Kenta Arai¹ (1. National Institute of Advanced Industrial Science and Technology)

3:45 PM - 4:00 PM

[1Ep10] Quantification of ESD measurements using standard conductance elements

*Naoya Miyauchi¹, Taro Yakabe¹, Masahiro Kitajima¹, Hajime Yoshida², Akiko N Itakura¹ (1. National Institute for Materials Science, 2. National Institute of Advanced Industrial Science and Technology)

4:00 PM - 4:15 PM

[1Ep11] Gas flow rate measurements of leak artefact for various gas species at its downstream side

*kenta arai¹ (1. National Institute of Advanced Industrial Science and Technology (AIST))

4:15 PM - 4:30 PM

[1Ep12S] Non-destructive beam profile diagnostic based on beam-induced fluorescence using a gas sheet

*ippei yamada^1,2, Motoi Wada¹, Junichiro Kamiya², Michikazu Kinsho² (1. Doshisha University, 2. J-PARC center, JAEA)

4:30 PM - 4:45 PM

[1Ep13] Amendment to JIS Z 8126-1 Vacuum technology−Vocabulary− Part 1 : General terms

*Hajime Yoshida¹ (1. National Institute of Advanced Industrial Science and Technology)

Session information