1:30 PM - 1:45 PM
*junichiro kamiya1, Kazuhiro Takano1, Kaoru Wada2 (1. Japan Atomic Energy Agency, 2. Tokyo Electronics Co.,Ltd.)
Vacuum Science Technology(VST)
Thu. Nov 4, 2021 1:30 PM - 2:30 PM Room E (Naoshima)
Chair:Hajime Yoshida(AIST)
1:30 PM - 1:45 PM
*junichiro kamiya1, Kazuhiro Takano1, Kaoru Wada2 (1. Japan Atomic Energy Agency, 2. Tokyo Electronics Co.,Ltd.)
1:45 PM - 2:00 PM
*Takao Nakamura1, Masahide Kuroiwa2, Shinsuke Kishikawa2, Shuichi Hemmi2, Ryuichiro Kamei3 (1. Institute of Industrial Science, The University of Tokyo, 2. Tokyo Electronics, CO. LTD, 3. Seinan Industry. LTD)
2:00 PM - 2:15 PM
naoki ogawa2,1, *hiroki kurisu2, setsuo yamamoto2 (1. RORZE Corporation, 2. Graduate School Science and Technology for Innovation Yamaguchi University)
2:15 PM - 2:30 PM
*Ryosuke Tsuchida1, Md. Suruz Mian1, Takeo Nakano1, Takashi Kikuchi2, Kazuhiko Mase2,3 (1. Graduate School of Science and Technology, Seikei University, 2. KEK, 3. SOKENDAI)
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