2021年日本表面真空学会学術講演会

Presentation information

Division

[1Ap01-15] 表面分析研究部会「最近の表面分析いろいろ」

Wed. Nov 3, 2021 1:30 PM - 5:30 PM Room A (Udon)

Chair:Mineharu Suzuki, Hideki Yoshikawa(National Institute for Materials Science)

1:30 PM - 1:45 PM

[1Ap01] Issues in Reliability of Measurement Data

*MINEHARU SUZUKI1 (1. SA Consulting)

In recent years, material development has been promoted in a short period of time, and multifaceted reliability has been regarded as a problem. In the field of surface analysis as well, reliability in the entire flow of measuring equipment, specimen preparation, measurement, and data processing becomes an issue. The elements of reliability in measurement are organized as 3Rs (repeatability, reproducibility, reproducibility). Based on this, the Surface Analysis Research Divisin introduced the progress of measurement and data processing using the latest equipment, and planned an opportunity to discuss standardization in surface chemical analysis.