[1Ap01-15] 表面分析研究部会「最近の表面分析いろいろ」

[1Ap02] Development of laboratory-based hard X-ray photoelectron spectroscopy

Tappei Nishihara¹, Masatake Machida², Satoshi Yasuno³, *Atsushi Ogura^1,4 (1. Meiji University , 2. Scienta Omicron, 3. JASRI, 4. MREL, Meiji Univ.)

Hard X-ray Photoelectron Spectroscopy (HAXPES), which uses higher-energy X-rays than conventional photoelectron spectroscopy (X-ray Photoelectron Spectroscopy: XPS) using AlKa (1486.6 eV) and MgKa (1253.6 eV), is drawing attention as one of the methods for evaluating the buried interface, which is a usually important factor that determines the device performance. Especially in recent years, laboratory-based HAXPES (Lab. HAXPES) has been developed and is being widely used in addition to synchrotron radiation facilities. Liquid GaKa (9251.74 eV) is used as the excitation light source to ensure stable and high intensity. In this presentation, we will introduce some measurement examples and discuss about the future prospects in various fields appropriate for Lab. HAXPES.