2021年日本表面真空学会学術講演会

Presentation information

Plasma Science and Technology(PST)

[1Da09-12] PST

Wed. Nov 3, 2021 11:00 AM - 12:00 PM Room D (Kotohira)

Chair:Keiichiro Urabe(Kyoto University)

11:45 AM - 12:00 PM

[1Da12] Localization of Inward Plasma Method Using Parmanent Magnetic Lens

*Hayato Nagasawa1, Ken Ogitani2, Reo Watanabe2, Hiroshi Suga1,2 (1. Graduate School of Chiba Institute of Technology , 2. Chiba Institute of Technology)

In order to solve these problems, we focused on the magnetic field lens using a permanent magnet that generates a small and strong magnetic field. In this study, we focused on a magnetic field lens using a permanent magnet that emits a strong magnetic field in a small size to solve these problems, and fabricated a magnetic field lens by analyzing the magnetic field using the finite element method and designing the shape of steel.