2021年日本表面真空学会学術講演会

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Surface Engineering/Thin Film/Semiconductor/Magnetic, Electronic, and Photonic devices/Electronic Material Processing(SE/TF/EMP/MI/MS)

[1Dp01-13] TF/SE/EMP/MI/MS

Wed. Nov 3, 2021 1:30 PM - 4:45 PM Room D (Kotohira)

Chair:

2:00 PM - 2:30 PM

[1Dp03] Synthesis and Characterization of Metal Oxide Thin Films
towards Novel Device Functionality

*Kohei Fujiwara1 (1. IMR, Tohoku University)

Metal oxides have been expected as a key ingredient for the next generation of electronics owing to their superior device functionality such as semiconducting, magnetic, ferroelectric/dielectric, and superconducting properties. In this talk, examples of the oxide thin-film growth and characterization/demonstration of new functional phenomena will be presented.