4:30 PM - 4:45 PM
[1Dp13] Formation of a mound-shaped structure in Ag thin films deposited by direct current sputtering
Microstructures and properties of Ag thin films deposited by direct current magnetron sputtering were studied. The Ag thin films deposited on substrates at high temperatures showed mound-shaped structures with space between grains. The lateral diameter of the grains increased with increasing substrate temperature, and the electrical resistivity also increased. The mound-shaped structure had not been displayed in thin film structure model. The formation of a mound-shaped structure with space is correlated with the high surface diffusivity of Ag and the relaxation of stress accumulated in the thin film during deposition.