2021年日本表面真空学会学術講演会

Presentation information

Vacuum Science Technology(VST)

[1Ea01-05] VST

Wed. Nov 3, 2021 9:00 AM - 10:15 AM Room E (Naoshima)

Chair:Junichiro Kamiya(Japan Atomic Energy Agency)

9:00 AM - 9:15 AM

[1Ea01] Pressure measurements of argon gas at the entrance and the exit of micropipettes with various diameters

*Tomohide Takami1, Naoki Kaneko1, Kyo Shibuya1, Kazuho Miyashita1, Mizuki Ohta1, Shiro Seki1 (1. Kogakuin University)

We have developed an internal pipette analysis method by measuring the argon partial exit pressure when argon gas is introduced from the tip of a glass micropipette, which is not affected by the gas released from the inner wall of the vacuum chamber. The exit partial pressure plot against the entrance pressure was extrapolated with quadratic functions. For various pipette inner diameters, the quadratic coefficient values of the quadratic function obtained in the plots could be linearly extrapolated in a one-log plot, and the inner diameter of the pipette could be determined by this measurement.