2021年日本表面真空学会学術講演会

Presentation information

Vacuum Science Technology(VST)

[1Ep08-13] VST

Wed. Nov 3, 2021 3:15 PM - 4:45 PM Room E (Naoshima)

Chair:Tomohide Takami(Kogakuin University)

4:00 PM - 4:15 PM

[1Ep11] Gas flow rate measurements of leak artefact for various gas species at its downstream side

*kenta arai1 (1. National Institute of Advanced Industrial Science and Technology (AIST))

A nitrogen gas flow rate through the leak artefact was measured for a nitrogen gas or a helium gas at its downstream side. In case of the clamped type leak artefact, the difference in the gas flow rate was not observed for downstream side gas species of both nitrogen and helium. However, the gas flow rate into the helium was decreased by about 10 % compared to that into the nitrogen.