[2Bp02-12] マイクロビームアナリシス技術部会

[2Bp11] Analysis of energy per atom dependent mass spectra in cluster TOF-SIMS

*Ken Mizuhata¹, Kousuke Moritani¹, Tetsuro Masumoto¹, Tomomichi Nakamura², Norio Inui¹ (1. Graduate School of Engineering,University of Hyogo, 2. Graduate School of Information Science,University of Hyogo)

We have measured the E/n dependence of SIMS spectra of nitrobenzylpyridinium salts (NBPs) using a size-selected argon (Ar) cluster TOF-SIMS apparatus which can select the size (n) of the cluster ion. The E/n dependency of fragment ion intensity may be due to the reaction path of fragment formation. We also examined a method to classify the fragment ions based on the correlation coefficient of the E/n-dependent curves.