[2Ca07-13] TF/SE/EMP/MI/MS

[2Ca08] Low damage Radical oxidation of Gold Nanoparticle Plasmon

*Kazuyasu Watanabe¹, Takeshi Kitajima¹, Toshiki Nakano¹ (1. National Defense Academy)

Plasmon, a gold nanoparticle, has been attracting attention in recent years. We have applied plasmons of gold nanoparticles to reduce damage to the plasma-irradiated surface due to ionic impact and to utilize it for the formation of high-quality ultrathin films. This time, we investigated the effect of silicon on radical oxidation at room temperature.