[2Ep01-04] VST

[2Ep02] Characterization of small vacuum process vessels made of 0.2% Be-Cu material

*Takao Nakamura¹, Masahide Kuroiwa², Shinsuke Kishikawa², Shuichi Hemmi², Ryuichiro Kamei³ (1. Institute of Industrial Science, The University of Tokyo, 2. Tokyo Electronics, CO. LTD, 3. Seinan Industry. LTD)

0.2% Be-Cu has characteristics such as 13 times higher heat conduction than SUS, low heat radiation of 1/7 or less, and low degassing, and is applied to ultra-high vacuum pressure gauges. The minimal fab system, which is a high-mix low-volume production scheme for semiconductors, uses a small vacuum vessel, but the impact on the process of vacuum vessel surface quality is inevitably large. This time, a container equivalent to the vacuum container of the minimal device made of SUS was made with 0.2% Be-Cu, and its superiority as a vacuum process container was confirmed.