2021年日本表面真空学会学術講演会

Presentation information

Poster (core time)

[2P01-37] Poster

Thu. Nov 4, 2021 3:30 PM - 5:30 PM P会場 (P会場)

座長
15:30-16:30 吉田靖雄(金沢大)
16:30-17:30 勝部大樹(長岡技術科学大)

[2P08S] Thermal effects for surface chemical state of PTFE irradiated by N+ ion beam

*Yoshitaka Nakayama1, Takano Ichiro2 (1. Graduate School of Engineering Kogakuin University, 2. Faculty of Engineering Kogakuin University)

PTFE is attracting attention as a high-frequency printed circuit board because of its stable electrical properties due to the strong bonding between F and C atoms. However, in order to be used as a printed circuit board, it is necessary to attach wiring materials, and the difficulty of material adhesion on PTFE is a problem. In this study, the PTFE surface was modified by low-angle N+ ion beam irradiation. The effect of irradiation heating on the surface chemical state was investigated by using glass and stainless steel substrates with different thermal conductivities.