2021年日本表面真空学会学術講演会

Presentation information

Poster (core time)

[2P01-37] Poster

Thu. Nov 4, 2021 3:30 PM - 5:30 PM P会場 (P会場)

座長
15:30-16:30 吉田靖雄(金沢大)
16:30-17:30 勝部大樹(長岡技術科学大)

[2P16S] Extraction of spinodal decomposition regulators in Shirasu porous glass thin film formation

*Nachi Chaya1, Daisuke Noguchi1, Kyosuke Teramura2, Tomoyasu Yano2, Michiko Kurihara3, Chieko Kondo3 (1. National Institute of Technology, Miyakonojo College, 2. MITSUI MINING & SMELTING CO.,LTD., 3. Takachiho Shirasu)

Our laboratory is conducting research and development of functional materials made from Shirasu, which is a volcanic ejecta widely distributed in the southern part of Kyushu, and has excellent properties such as low refractive index, high transparency, and hydrophilic properties. Among them, we paid attention to the anti-fog property to which the hydrophilic property was applied, and tried to prepare a porous thin film to solve the common problem of anti-fog materials that it is difficult to maintain the excellent anti-fog property for a long period of time. We have succeeded in producing a porous thin film by using the phase separation phenomenon of glass to improve the hydrophilicity. The purpose of this study is to clarify the spinodal decomposition control factors in the Shirasu thin film prepared by the sputtering method. Specifically, we evaluated the physical properties of the thin film composition and the thin film structure with the aim of clarifying the correlation between changes in the thin film composition due to film formation conditions such as gas pressure and input power and spinodal decomposition and its mechanism.