[3Ba01-12] スパッタリングおよびプラズマプロセス技術部会「スパッタ・プラズマで切り拓くナノ構造の世界」

[3Ba05] Magneto-dielectric properties of magnetic metal-ceramics nanogranular thin films prepared by sputtering

*Hiroshi Masumoto¹ (1. Frontier Research Institute for Interdisciplinary Sciences, Tohoku University)

Recently, our group discovered that the dielectric properties of these films change with the application of a magnetic field at room temperature, and we named this effect the "Tunneling Magneto Dielectric (TMD) effect". I will introduce the background of our research on magnetic metal-ceramics nano-granular thin films and magneto-dielectric properties, the mechanism of the TMD effect and how to fabricate the thin films by sputtering.