[3Ba01-12] スパッタリングおよびプラズマプロセス技術部会「スパッタ・プラズマで切り拓くナノ構造の世界」

[3Ba11S] Time resolved optical emission spectroscopy of HiPIHCS discharge

*kata mori¹, Nikolay Britun², Ming Yang¹, tetsuhide shimizu¹ (1. Graduate School of Systems Design, Tokyo Metropolitan University, 2. Center for Low-temperature Plasma Sciences, Nagoya University)

Understanding of time evolution of HiPIHCS discharge physics is important in precise control of growth of nanoparticles. In this study, time resoleved optical emission analysis was perfomed by using Ti hollow cathode discharge in Ar atmopsphere.