2021年日本表面真空学会学術講演会

Presentation information

Surface Analysis/Applied Surface Science/Evaluation Technique(ASS)

[3Da01-12] ASS

Fri. Nov 5, 2021 9:00 AM - 12:00 PM Room D (Kotohira)

Chair:Naoka Nagamura(National Institute for Materials Science), Daisuke Fujita(National Institute for Materials Science)

11:30 AM - 11:45 AM

[3Da11] Effect of probe’s mass on dynamic spring constant of AFM force sensor

*Wataru Kurahashi1, Yoshiaki Sugimoto1 (1. Graduate School of Frontier Sciences, The University of Tokyo)

We discussed the effect of probe’s mass on the bending oscillation or length extension of the force sensor of the frequency-modulated atomic force microscope (FM-AFM). As the mass of the probe increased, the sensor’s frequency and dynamic spring constant were calculated to decrease in both bending oscillation and length extension, respectively. The reduction ratio is larger for length extension, and in the case of a force sensor that uses length extension such as a length-extension resonator (LER), it is necessary to obtain the atomic force using a model that takes into account the mass of the probe.