2021年日本表面真空学会学術講演会

Presentation information

Poster (core time)

[3P01-27] Poster

Fri. Nov 5, 2021 1:30 PM - 3:30 PM P会場 (P会場)

座長
13:30-14:30 一ノ倉聖(東工大)
14:30-15:30 土師将裕(東大)

[3P12] Machine learning based determination of crystal orientation in field ion micrograph

*Mizuki Yamada1, Tadasuke Okazawa1, Shigekazu Nagai1, Koichi Hata1 (1. Graduate School of Engineering, Mie University)

Field ion microscope (FIM) has the capability to observe the atomic arrangement of the surface of a metal tip. Using FIM images continuously taken during field evaporation, the internal structure of the specimen can be observed by three-dimensional reconstruction of the specimen. However, the compression factor is needed for three-dimensional reconstruction. In order to calculate the compression factor, we automatically identified the crystal orientation of tungsten FIM images using machine learning. As a result, the correct crystal orientation was output for 88% of the total data, indicating the effectiveness of this method.