[3P21] Dynamic operation of field ion microscopy observation and Poschlenrieder-atom probe mass analysis using ion deflector
In the conventional field ion microsope (FIM) -atom probe (AP), there is a hole on the screen of FIM, where the filed desorbed ion go through to Time of Fligh mass spectrometer section. The probe hole has been inhibitting the image acquisition of FIM of the mass analyzed region. The deflector electrodes newly placed in this work act as image shifter of FIM which enables to view the probing region during AP cycle just after the detection of field desorbed ion in ToF analyzer. The performance and the benefit of the system will be presented.