Session 7: 3D Micro/Nano fabrication 2

Tue. Jun 13, 2023 4:30 PM - 6:10 PM Room 3 (1F Meeting Room ＃1)

Session Chairs:Kotaro Obata(RIKEN, Japan)

4:30 PM - 4:50 PM

[R3-S07-1] Fabrication of 3D flexible wiring with conducive polymer by laser-scanning stereolithography

*Masaru Mukai¹, Mai Takenouchi¹, Shoji Maruo¹ (1. Yokohama National University (Japan))

4:50 PM - 5:10 PM

[R3-S07-2] Glass molding tools fabricated with Selective Laser-induced Etching for sustainable treatment of solid-state electrolytes to improve power density of sodium-based batteries

*Christian Peters¹, Benjamin Geppert¹, Enkhtsetseg Dashjav², Martin Kratz¹, Frank Tietz² (1. Fraunhofer ILT - Institute for Laser Technology (Germany), 2. Forschungszentrum Jülich GmbH (Germany))

5:10 PM - 5:30 PM

[R3-S07-3] On the use of a femtosecond laser micro-processing combined with chemical etching for free-form microstructures in ultra-low expansion (ULE) glass
[Student presentation]

*Gözden Torun¹, Samuel Benketaf¹, Margarita Lesik¹, Pieter Vlugter¹, Yves Bellouard¹ (1. EPFL Galatea Lab. (Switzerland))

5:30 PM - 5:50 PM

[R3-S07-4] Femtosecond UV laser writing technique for selective etching in fused silica

*Benedikt Hermann¹, Yves Bellouard¹ (1. EPFL (Switzerland))

5:50 PM - 6:10 PM

[R3-S07-5] Optical far field-induced nearfield breakdown (O-FIB) for sub-20-nm ultrafast laser processing
[Student presentation]

*Zhen-Ze Li¹, Xin-Jing Zhao¹, Yi Wang², Xu Zhang¹, Yan-Hao Yu¹, Lei Wang¹ (1. Jilin University (China), 2. Tsinghua University (China))

Session information

Session 7: 3D Micro/Nano fabrication 2

[R3-S07-1] Fabrication of 3D flexible wiring with conducive polymer by laser-scanning stereolithography

[R3-S07-2] Glass molding tools fabricated with Selective Laser-induced Etching for sustainable treatment of solid-state electrolytes to improve power density of sodium-based batteries

[R3-S07-3] On the use of a femtosecond laser micro-processing combined with chemical etching for free-form microstructures in ultra-low expansion (ULE) glass
[Student presentation]

[R3-S07-4] Femtosecond UV laser writing technique for selective etching in fused silica

[R3-S07-5] Optical far field-induced nearfield breakdown (O-FIB) for sub-20-nm ultrafast laser processing
[Student presentation]

Authentication

Session information

Session 7: 3D Micro/Nano fabrication 2

[R3-S07-1] Fabrication of 3D flexible wiring with conducive polymer by laser-scanning stereolithography

[R3-S07-2] Glass molding tools fabricated with Selective Laser-induced Etching for sustainable treatment of solid-state electrolytes to improve power density of sodium-based batteries

[R3-S07-3] On the use of a femtosecond laser micro-processing combined with chemical etching for free-form microstructures in ultra-low expansion (ULE) glass[Student presentation]

[R3-S07-4] Femtosecond UV laser writing technique for selective etching in fused silica

[R3-S07-5] Optical far field-induced nearfield breakdown (O-FIB) for sub-20-nm ultrafast laser processing[Student presentation]

Authentication

[R3-S07-3] On the use of a femtosecond laser micro-processing combined with chemical etching for free-form microstructures in ultra-low expansion (ULE) glass
[Student presentation]

[R3-S07-5] Optical far field-induced nearfield breakdown (O-FIB) for sub-20-nm ultrafast laser processing
[Student presentation]