The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 5: Burst ablation

Tue. Jun 13, 2023 4:30 PM - 5:50 PM Room 1 (2F Meeting Room #3)

Session Chairs:Yasutaka Hanada(Hirosaki University, Japan)

4:50 PM - 5:10 PM

[R1-S05-2] Numerical simulation of silicon laser ablation with GHz bursts of femtosecond pulses

*Ashkan Momeni Bidzard1, Koji Sugioka1 (1. RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako-shi, Saitama 351-0198 (Japan))

Keywords:Femtosecond laser ablation, GHz burst

C000197

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