On the use of a femtosecond laser micro-processing combined with chemical etching for free-form microstructures in ultra-low expansion (ULE) glass<br /><span style="color:#008000;">[Student presentation]</span>

17:10 〜 17:30

[R3-S07-3] On the use of a femtosecond laser micro-processing combined with chemical etching for free-form microstructures in ultra-low expansion (ULE) glass
[Student presentation]

*Gözden Torun¹, Samuel Benketaf¹, Margarita Lesik¹, Pieter Vlugter¹, Yves Bellouard¹ (1. EPFL Galatea Lab. (Switzerland))

キーワード：ultra-low expansion glass, 3D microstructures, femtosecond laser processing, wet chemical etching, micro-devices

C000216

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