The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 7: 3D Micro/Nano fabrication 2

Tue. Jun 13, 2023 4:30 PM - 6:10 PM Room 3 (1F Meeting Room ＃1)

Session Chairs:Kotaro Obata(RIKEN, Japan)

5:50 PM - 6:10 PM

[R3-S07-5] Optical far field-induced nearfield breakdown (O-FIB) for sub-20-nm ultrafast laser processing
[Student presentation]

*Zhen-Ze Li1, Xin-Jing Zhao1, Yi Wang2, Xu Zhang1, Yan-Hao Yu1, Lei Wang1 (1. Jilin University (China), 2. Tsinghua University (China))

Keywords:far field-induced nearfield breakdown, nearfield enhancement, nanoprocessing

C000241

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