The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

Presentation information

Oral Presentation

Oral Presentations

Session 9: Fundamental aspects

Wed. Jun 14, 2023 9:20 AM - 11:00 AM Room 1 (2F Meeting Room #3)

Session Chairs:Gediminas Račiukaitis(FTMC - Center for Physical Sciences and Technology, Lithuania)

10:40 AM - 11:00 AM

[R1-S09-5] 4H-SiC surface modified by green femtosecond laser at low fluence
[Student presentation]

*Yi-Hsien Liu1, Chung-Wei Cheng1 (1. National Yang Ming Chiao Tung University (Taiwan))

Keywords:femtosecond laser , silicon carbide, crystallinity

C000186

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Password