The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 11: Micro-machining

Wed. Jun 14, 2023 9:40 AM - 11:00 AM Room 3 (1F Meeting Room ＃1)

Session Chairs:Yongfeng Lu(University of Nebraska-Lincoln, USA)

10:00 AM - 10:20 AM

[R3-S11-2] Fundamental Study on High-quality Micro-shape Fabrication on Monocrystalline Diamond by Nanosecond Pulsed Laser
[Student presentation]

*Kaichi Kawata1, Tsubasa Okubo1, Yasuhiro Okamoto1, Akira Okada1 (1. Okayama University (Japan))

Keywords:Monocrystalline diamond, Nanosecond pulsed laser, Micro-shape fabrication, Acid cleaning, Processing front

C000046

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