The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 11: Micro-machining

Wed. Jun 14, 2023 9:40 AM - 11:00 AM Room 3 (1F Meeting Room ＃1)

Session Chairs:Yongfeng Lu(University of Nebraska-Lincoln, USA)

10:40 AM - 11:00 AM

[R3-S11-4] Laser ablation of ultrathin SiNx coated Si wafer – evaluation of process performance for PERC solar cell application
[Student presentation]

*Pinalkumar Gopaldas Rana1, Anil Kottantharayil2, Deepak Marla1 (1. Department of Mechanical Engineering, Indian Institute of Technology Bombay, Mumbai-400076 (India), 2. Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai-400076 (India))

Keywords:Nanosecond laser, Laser ablation, Photoluminance mapping, Minority carrier lifetime

C000257

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