The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

Presentation information

Print

Oral Presentation

Oral Presentations

Session 12: Surface processing 2

Wed. Jun 14, 2023 9:20 AM - 11:00 AM Room 4 (2F Meeting Room #6)

Session Chairs:Godai Miyaji(Tokyo University of Agriculture and Technology, Japan)

9:20 AM - 9:40 AM

[R4-S12-1] Regular LIPSS Patterns Generated on Silicon with Femtosecond Laser Pulses

*Yoann Levy1, Juraj Sládek1,2, Thibault J.-Y. Derrien1, Nadezhda M. Bulgakova1 (1. HiLASE Centre, FZU - Institute of Physics of the Czech Academy of Sciences (Czech Republic), 2. Czech Technical University in Prague, Faculty of Nuclear Sciences and Physical Engineering (Czech Republic))

Keywords:Highly regular LIPSS, Low spatial frequency LIPSS, Stripes of LIPSS, Laser-induced amorphization, Silicon

C000123

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Password