Session 12: Surface processing 2

[R4-S12-1] Regular LIPSS Patterns Generated on Silicon with Femtosecond Laser Pulses

*Yoann Levy¹, Juraj Sládek^1,2, Thibault J.-Y. Derrien¹, Nadezhda M. Bulgakova¹ (1. HiLASE Centre, FZU - Institute of Physics of the Czech Academy of Sciences (Czech Republic), 2. Czech Technical University in Prague, Faculty of Nuclear Sciences and Physical Engineering (Czech Republic))

キーワード：Highly regular LIPSS, Low spatial frequency LIPSS, Stripes of LIPSS, Laser-induced amorphization, Silicon

C000123