The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 13: Ultra-short pulse laser processing 1 (Beam shaping)

Wed. Jun 14, 2023 2:10 PM - 3:50 PM Room 1 (2F Meeting Room #3)

Session Chairs:Yasuhiko Shimotsuma(Kyoto University, Japan)

2:10 PM - 2:30 PM

[R1-S13-1] Comparison of different drilling processes for multibeam optical systems

*Philipp Bremer1, Dennis Haasler1 (1. Fraunhofer Institute for Laser Technology ILT (Germany))

Keywords:ultra short pulsed drilling, multibeam processing, diffractive optical element, micro holes

C000171

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