Session 13: Ultra-short pulse laser processing 1 (Beam shaping)

[R1-S13-2] First-time right ablation with flexible multibeams generated by a high-power spatial light modulator

*Martin Thomas Kratz¹, Moritz Kröger², Benedikt Bornschlegel², Martin Reininghaus¹ (1. Fraunhofer ILT - Institute for Laser Technology (Germany), 2. RWTH Aachen University LLT - Chair for Laser Technology (Germany))

キーワード：Ultrashort pulse laser processing, Microstructuring, Beam shaping, High power, Spatial Light Modulator

C000174