The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 25: Ultra-short pulse laser processing 4 (3D glass modification and microfluidic chip)

Thu. Jun 15, 2023 2:10 PM - 3:50 PM Room 1 (2F Meeting Room #3)

Session Chairs:Calum Ross(Heriot-Watt University, UK)

2:10 PM - 2:30 PM

[R1-S25-1] Bonding-free manufacture of large-scale fused silica microchannels enabled by hybrid laser microfabrication

*Jian Xu1, Aodong Zhang1, Jianping Yu2, Ming Hu1, Xin Li1, Ya Cheng1,2 (1. East China Normal University (China), 2. Shanghai Institute of Optics and Fine Mechanics (China))

Keywords:Ultrafast laser assisted etching, Glass microfluidics, Chemical etching, Carbon dioxide laser, Optofluidics

C000084

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