Dual layer lift-off process for microelectrode fabrication on lithium niobate photonic chips using femtosecond laser lithography

Presentation information

Oral Presentation

Oral Presentations

Session 32: LIPSS, micropatterning and structuring 3

Thu. Jun 15, 2023 4:30 PM - 6:00 PM Room 4 (2F Meeting Room #6)

Session Chairs:Mizue Mizoshiri(Nagaoka University of Technology, Japan,)

5:00 PM - 5:20 PM

*Jinming Chen¹, Lvbin Song¹, Zhaoxiang Liu¹, Guanhua Wang¹, Chao Sun¹, Ya Cheng¹ (1. East China of Normal University (China))

Keywords:femtosecond laser lithography, microelectrode fabrication, lift-off

C000009

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