Influence of beam polarizations on silicon carbide grooving via femtosecond laser<br /><span style="color:#008000;">[Student presentation]</span>

Presentation information

Oral Presentation

Oral Presentations

Thu. Jun 15, 2023 4:30 PM - 6:00 PM Room 4 (2F Meeting Room #6)

Session Chairs:Mizue Mizoshiri(Nagaoka University of Technology, Japan,)

5:40 PM - 6:00 PM

*Jia-Fan Kuo¹, Chung-Wei Cheng¹ (1. National Yang Ming Chiao Tung University (Taiwan))

Keywords:Silicon Carbide, femtosecond laser, vector beam, LIPSS

C000017

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