The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 34: Laser, optics and systems for laser microprocessing 1

Fri. Jun 16, 2023 9:10 AM - 10:40 AM Room 2 (3F Multipurpose Room)

Session Chairs:Yoshio Hayasaki(Utsunomiya University, Japan)

10:20 AM - 10:40 AM

[R2-S34-4] 3D nanolithography using super-low cost translation stage

Darius Gailevicius1, Sima Rekstyte Paipuliene2, Maciej Kretkowski1, *Vygantas Mizeikis1 (1. Shizuoka University (Japan), 2. Vilnius University (Lithuania))

Keywords:direct laser write, low-cost, nanopositioning, woodpile

C000129

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