The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 35: Special Session 2-3 "Machine Learning and Simulation for Laser Processing"

Fri. Jun 16, 2023 9:10 AM - 10:40 AM Room 3 (1F Meeting Room ＃1)

Session Chairs:Kenichi Ishikawa(The University of Tokyo, Japan), Tomohito Otobe(National Institutes for Quantum and Radiological Science and Technology, Japan)

10:20 AM - 10:40 AM

[R3-S35-4] Electronic-Temperature Effects on Laser Ablation of Si: A Molecular Dynamics Study

*Ryo Kobayashi1, Tomohito Otobe2 (1. Nagoya Institute of Technology (Japan), 2. National Institutes for Quantum Science and Technology (Japan))

Keywords:molecular dynamics simulation, laser ablation, electronic temperature

C000021

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