Session 36: Process monitoring and control 1

[R4-S36-3] Classification of photo-acoustic emission in Direct Laser Interference Pattering for identifying the spatial period

*Tobias Steege¹, Adrian Belkin¹, Christoph Zwahr¹, Andrés F. Lasagni^2,1 (1. Fraunhofer Institute for Material and Beam Technology IWS (Germany), 2. Technische Universität Dresden (Germany))

キーワード：acoustic emission, Direct Laser Interference Patterning, laser-material interaction

C000180