The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 38: Lasers, optics and systems for laser microprocessing 2

Fri. Jun 16, 2023 11:00 AM - 12:00 PM Room 2 (3F Multipurpose Room)

Session Chairs:Yasuhiro Okamoto(Okayama University, Japan)

11:20 AM - 11:40 AM

[R2-S38-2] Improvement of beam stability using spatial light modulator for high-precision laser processing

*Satoshi Hasegawa1, Yoshio Hayasaki1 (1. Center for Optical Research and Education (CORE), Utsunomiya University (Japan))

Keywords:laser microfabrication, spatial light modulator, phase grating, beam stability

C000268

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