The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

Presentation information

Print

Oral Presentation

Short Presentations for Poster Session

Short Presentations of Poster Session 2

Thu. Jun 15, 2023 11:20 AM - 12:10 PM Room 1 (2F Meeting Room #3)

Session Chairs:Mitsuhiro Terakawa(Keio University, Japan)

11:58 AM - 12:00 PM

[P2-20] Micrometer-scale high-aspect machining of PDMS elastomer using laser plasma EUV radiation

Kotaro Oguchi1, Yuhao Wang1, *Tetsuya Makimura1 (1. University of Tsukuba (Japan))

Keywords:extreme ultraviolet radiation, micromachining, polydimethylsiloxane, PDMS

C000231

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Password