The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 40: Process monitoring and control 2

Fri. Jun 16, 2023 11:00 AM - 12:20 PM Room 4 (2F Meeting Room #6)

Session Chairs:Daisuke Nakamura(Kyushu University, Japan)

11:00 AM - 11:20 AM

[R4-S40-1] In-situ monitoring of laser machining in transparent and hard brittle materials with chuck-based electric fields

*Chao-Ching Ho1, Han-san Xie1, Che-Yu Hsieh1 (1. National Taipei University of Technology (Taiwan))

Keywords:In-situ monitoring , laser machining in transparent and hard brittle materials, chuck-based electric fields

C000116

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