The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

Presentation information

Oral Presentation

Oral Presentations

Session 40: Process monitoring and control 2

Fri. Jun 16, 2023 11:00 AM - 12:20 PM Room 4 (2F Meeting Room #6)

Session Chairs:Daisuke Nakamura(Kyushu University, Japan)

12:00 PM - 12:20 PM

[R4-S40-4] Fabrication of miniature optics by laser-induced thermal reflow of discretized primitive shapes with a goal-oriented process-feedback control
[Student presentation]

*Samuel Benketaf1 (1. EPFL - IEM Galatea lab (Switzerland))

Keywords:goal-oriented process-feeback, glass micro-optics, laser induced reflow, femtosecond laser-assisted wet etching, process control

C000218

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