The 40th Annual Meeting of The Laser Society of Japan

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口頭講演

D: Laser processing

[D01-20p-V] 新技術

Mon. Jan 20, 2020 1:30 PM - 3:00 PM meeting room 4-1 (exhibition wing)

座長:宮地 悟代(東京農工大学大学院工学研究院　先端物理工学部門)

2:45 PM - 3:00 PM

[D01-20p-V-05] KrFエキシマレーザー照射による多結晶ダイヤモンド膜表面の平坦化加工

○Toshifumi Kikuchi1, Yuki Katamune2, Hiroshi Ikenoue3, Tsuyoshi Yoshitake3 (1. Tamari Industry Co.,LTD., 2. Kyushu Inst. of Technology, 3. Kyushu Univ.)

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