The 43rd Annual Meeting of The Laser Society of Japan

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Oral Presentation

D: Laser processing

[D09-19p-VII] Femtosecond laser processing

Thu. Jan 19, 2023 3:15 PM - 5:00 PM Room VII (12th Floor 1202)

Chair: Yasuhiko Shimotsuma

3:15 PM - 3:45 PM

[D09-19p-VII-01] 【招待講演】
レーザスライシング技術による単結晶SiCの精密切断

*Yohei Yanada1, Junichi Ikeno1 (1. Saitama University)

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