[F05-20p-XII] Novel Nitride Semiconductor Laser

[F05-20p-XII-02] 【論文発表賞応募演題】
加熱加圧水によるサファイア基板からのAlGaN膜の剥離方法

*Eri Matsubara¹, Ryota Hasegawa¹, Toma Nishibayashi¹, Ayumu Yabutani¹, Ryoya Yamada¹, Yoshinori Imoto¹, Ryosuke Kondo¹, Sho Iwayama^1,2, Motoaki Iwaya¹, Tetsuya Takeuchi¹, Satoshia Kamiyama¹, Kanako Shojiki^2,3, Shinya Kumagai¹, Hideto Miyake² (1. Meijo University, 2. Mie University, 3. Osaka University)